Used semiconductor & Scientific equipment, ISO14001 certified

Particle Senser : KS-40A

• Optical system : Light-scattering method
• Light source : Laser diode(wavelength 830nm)
• Light detector : PIN type photodiode
• Materials of parts exposed to sample : Synthetic quartz, PFA
• Size range : Over 0.1, 0.15, 0.2, 0.3, 0.5μm
• Flow rate : 10mL/min
• Max. particle number concentration : 1200 particles/mL(at 5% coincidence loss for 0.1μm particles)
• Environmental conditions for operation : 15-35 deg(no dew condensation)

Controller : KE-40A

• Particle size range : max. 6 channels(5 channels when you combine with KS-40A)

Bellows Sampler K9904A-A *Kyushu Rion

• Pumping method : Bellows method
• Liquid for use : Photoresist, deionized water, drug solution
• Liquid temp. range : 5-40 deg
• Max. discharge volume : 15mL/stroke

*Laptop is attached. (For control)