Used semiconductor & Scientific equipment, ISO14001 certified

Japanese

Tanaka Corporation

YOUTEC／XEF2 Etching Machine Ref.No.02960
  • Gas : XEF2
  • Security : Emergency stop switch, Leakage sensor, Gas detector
  • Touch Panel Operation (Gas line, Exhaust line, Bulb, Display for valve)
  • Robot Carrier(Front room-Robot room-Reaction room)
  • Vacuum pull using Dry pump
  • Nikon stereo microscope is attached.
  • Sample Size : Holder for 5 inches is attached.
  • Cyclic Cooling Water : 2.5-3.0L/min
  • Drive Air : 0.5-0.6 Mpa
  • N2 Gas : 8.0-10.0 L/min (2 line)
  • Power Supply : AC200V max50A (Primary side ELB)

YOUTEC／XEF2 Etching Machine Ref.No.02960   YOUTEC／XEF2 Etching Machine Ref.No.02960   YOUTEC／XEF2 Etching Machine Ref.No.02960  
YOUTEC／XEF2 Etching Machine Ref.No.02960   YOUTEC／XEF2 Etching Machine Ref.No.02960   YOUTEC／XEF2 Etching Machine Ref.No.02960