Used semiconductor & Scientific equipment, ISO14001 certified
Japanese
Tanaka Corporation
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TOHKEN／X-Ray Inspection System／TUX-3000W Ref.No.03214
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- 2005 vintage
- Detail detectability : 0.4μm-3μm
- Filament type : High brightness type Lab6 chip
- Max. resolution(micro chart) : 0.4μm(JIMA chart)
- X-ray output : Tube voltage : 40-120kV/Tube current : 0-200μA
- Geometric magnification : 1500x
- Max. monitor magnifcation : 6000x
- Stage size : diameter 60mm
- Max. inspection range : diameter 60mm
- Stage stroke : X axis ±30nm, Y axis ±30mm, Z axis 200mm, θ axis 350 deg
- Tilt inspection style/Tilt : stage tilt style/45 deg
- Inspection detector : 4/2 inches changeable style I.I aluminum window
- Camera : 1.45 million pixel CCD 10bit grayscale
- Max. view size : 16mm x 12mm
- Dimension : W1040 x H2080 x D1180mm
- Weight : About 1000kg
- Power supply : AC100V, 3kVA(includes option)
