Used semiconductor & Scientific equipment, ISO14001 certified

Japanese

Tanaka Corporation

HITACHI Scanning Electron Microscope SU1510 Ref. No. 08708
・Resolution for secondary electron image : 3.0nm for high vacuum, 30kV as acceleration voltage and WD5mm, 15nm for high vacuum, 3kV as acceleration voltage and WD5mm

・Resolution for reflection electron image : 4.0nm for 6Pa as low vacuum mode, 30kV as acceleration voltage and WD5mm)

・Magnification : 5 to 300,000x

・Filament : cartridge (tungsten filament)

・Acceleration voltage : 0.3 to 30kV

・Image shift : more then ±50um (WD=15mn)

・Vacuum pumps : turbomolecular pump x 1, rotary pump x 1

・Sample fine-movement device : motor drive unit by XY, 2 axes
X : 0 to 80mm, Y : 0 to 40mm in electromotion
Z(WD) : 5 to 50mm, R : 360° for sample spinning, T : -20 to 90° for  sample tilt in hand motion 

Maximum acceptable sample size : Φ153mm

Power supply : AC100V 1Φ 2kVA 50/60Hz (±10% as voltage fluctuation, type D grounded solo)

Dimension and wight : approx. W1100 x D1000 x H1500mm for main and approx. 400kg for main body part

Approximate installation space : approx. W2300 x D1600 x H1600mm included main body, SEM desk, EDX desk and extra-space for maintenance 

Accessories and options : BSE reflection electron detector, ESED low vacuumed secondary electron detector, EDX (X-max produced by HORIBA) 3D VIEW as 3D software, Zizag Capture as a function to integrate serial field images, Hi-Mouse, PC, SEM Date Manager, motor drive unit by XY, 2 axes, extra-filaments, diaphragms, sample table, recovery CD and so on.


HITACHI Scanning Electron Microscope/SU1510Hitachi Scanning Electron Microscope su1510HITACHI Scanning Electron Microscope SU1510
Hitachi Scanning Electron Microscope/su1510 Hitachi scanning electron microscope su1510 HITACHI Scanning Electron Microscope SU1510
hitachi Scanning Electron Microscope su1510HITACHI Scanning Electron Microscope Unit SU1510Hitachi scanning electron microscope su1510